Seven-inch large-size synthesis of monolayer...... lushiqiang 周三, 08/31/2016 - 14:03 学术动态 论文 所属研究小组 一 Seven-inch large-size synthesis of monolayer hexagonal BN film by low-pressure CVD.pdf 论文作者 Chenping Wu1, Abdul Majid Soomro1, Feipeng Sun1, Huachun Wang1, Chuan Liu2, Xiaodong Yang2, Junyong Kang1, and Duanjun Cai*,1 刊物名称 PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS JCR分区 三区 论文摘要 We report the large-size synthesis of atomic monolayer hexagonal boron nitride (h-BN) film on flexible Cu foil by a low-pressure chemical vapor deposition (CVD) method. The borazane powder was used as the precursor carried by mixed hydrogen/argon gases. By rolling the Cu foil substrate into a cylindrical shape, wafer-scale monolayer h-BN film has been achieved at a size over 7 in. With the aid of PMMA, the h-BN monolayer was transferred onto a 400 Si wafer for characteri- zation and further electrical applications. This technique could be transferred to thin-film growth on any flexible substrates.
